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一、论文类

2022年:

1. P. Cheng*, Q. Yao*,#, J.Q Xu, Q. Sun, A.J Grutter, P. Quarterman, P.P Balakrishnan, C.J Kinane, A.J Caruana, S. Langridge, A. Li, B. Achinuq, E. Heppell, Y.C Ji, S.S Liu, B.S Cui, J.M Liu, P.Y Huang, Z.K Liu, G.Q Yu, F.X Xiu, T. Hesjedal, J. Zou, X.D Han, H.J Zhang, Y.M Yang#, and X.F Kou#, “Tailoring the Magnetic Exchange Interactions in Ferromagnet-Intercalated MnBi2Te4 Superlattices”, Nature Electronics 6, 18–27 (2022) 上科大信息学院寇煦丰课题组

2. Yuheng Liu, Lipeng Xia, Ting Li, Yuhan Sun, Peiji Zhou, Li Shen, and Yi Zou, "High-efficiency mid-infrared on-chip silicon grating couplers for perfectly vertical coupling," Opt. Lett. 48, 239-242 (2023) 上科大信息学院邹毅课题组

3. Cheng G, Yi Q, Li Q, et al. Single-step etched two-dimensional polarization splitting dual-band grating coupler for wavelength (de)multiplexing. Opt Lett. 2022;47(15):3924-3927. doi:10.1364/OL.462937 上科大信息学院邹毅课题组

4. Wenchang He, Yuhan Sun, Peiji Zhou, Lipeng Xia, Ting Li, Qiyuan Yi, Li Shen, Zhenzhou Cheng, and Yi Zou, "Subwavelength structure engineered passband filter for the 2-µm wave band," Opt. Lett. 48, 827-830 (2023)上科大信息学院邹毅课题组

5. Jie Deng, Jing Zhou,* Xu Dai, Yonghao Bua, Zhifeng Lia, and Xiaoshuang Chen*, “Photoresponse enhancement in a cavity-antenna-coupled graphene terahertz detector”, Nanoscale, 2023, 15, 1775 - 1781, Accepted Manuscript. 中科院技物所周靖课题组

6. Jie Deng, Wei Zhang, Xu Dai, Yu Yu, Zhifeng Li, Wei Wang, Lin Wang*, Jing Zhou* and Xiaoshuang Chen*, “Nonmonotonic wavelength dependence of polarization-sensitive infrared photoresponse of an anisotropic semimetal”, Nanoscale 14, 7314 – 7321 (2022). 中科院技物所周靖课题组

7. J. Wu et al., "Advanced Surface Acoustic Wave Resonators on LiTaO₃/SiO₂/Sapphire Substrate," in IEEE Electron Device Letters, vol. 43, no. 10, pp. 1748-1751, Oct. 2022, doi: 10.1109/LED.2022.3200418. 上科大信息学院吴涛课题组

8. J. Cai, Y. Wang, D. Jiang, S. Zhang, Y. Gu, L. Lou, F. Gao, and T. Wu. "Beyond Fundamental Resonance Mode: High-Order Multi-Band AlN PMUT for in Vivo Photoacoustic Imaging." Microsystems & Nanoengineering 8, no. 1: 116, Nov. 2022. doi:10.1038/s41378-022-00426-7上科大信息学院吴涛课题组

9. S. Shao, Z. Luo, K. Liu, and T. Wu, "Lorentz-force gyrator based on AlScN piezoelectric thin film", Appl. Phys. Lett. 121, 213505 (2022). doi:10.1063/5.0122325 上科大信息学院吴涛课题组

10. K. Liu, Y. Lu and T. Wu, "7.5 GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate Resonator," in IEEE Electron Device Letters, doi: 10.1109/LED.2022.3230911.上科大信息学院吴涛课题组

11. Z. Luo, S. Shao, K. Liu, Y. Lu, A. Mazzalai, C. Tosi, and T. Wu, "Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2· Qm) over 146", Appl. Phys. Lett. 120, 173508, 2022, doi:10.1063/5.0090226.上科大信息学院吴涛课题组

12. L. Li*, Y.Y Wu*, X.Y Liu*, J.M Liu*, H.Z Ruan, Z.H Zhi, Y. Zhang, P.Y Huang, Y.C Ji, C.J Tang, Y.M Yang, R.C Che#, and X.F Kou#, “Room Temperature Gate-Tunable Non-Reciprocal Charge Transport in Lattice-Matched InSb/CdTe Heterostructures”, Adv. Mater. 2207322 (2022) 上科大信息学院寇煦丰课题组

13. Wang L, Xie Z, Pan B, et al. High-Speed Photodetector With Simultaneous Electrical Power Generation[J]. Journal of Lightwave Technology, 2023, 41(2). 上科大信息学院陈佰乐课题组

14. Li L, Pan R, Xie Z, et al. High-speed Ge-on-GaAs photodetector[J]. Optics Express, 2022, 30(12): 20684-20696.上科大信息学院陈佰乐课题组

15. Wang Z, Huang J, Zhu L, et al. High-performance InP-based bias-tunable near-infrared/extended-short wave infrared dual-band photodetectors[J]. Journal of Lightwave Technology, 2022, 40(15): 5157-5162. 上科大信息学院陈佰乐课题组

16. Shen, Jinyong, Tianyun Zhu, Jing Zhou*, Zeshi Chu, Xiansong Ren, Jie Deng, Xu Dai, Fangzhe Li, Bo Wang, Xiaoshuang Chen*, and Wei Lu*. 2023. "High-Discrimination Circular Polarization Detection Based on Dielectric-Metal-Hybrid Chiral Metamirror Integrated Quantum Well Infrared Photodetectors" Sensors 23, no. 1: 168. 中科院技物所周靖课题组

17. Xu Dai, Zeshi Chu, Jie Deng, Fangzhe Li, Jing Zhou*, Dayuan Xiong, Xiaohao Zhou, Xiaoshuang Chen*, Ning Li, Zhifeng Li, Wei Lu, and Xuechu Shen, “Detection band expansion by independently tunable double resonances in a long-wavelength dual-color QWIP”, Optics Express 30, 43579-43589 (2022). 中科院技物所周靖课题组

18. Y. Wang, Y. Chen, Y. Zhang, Z. Zhu, T. Wu, X. Kou, P. Ding, R. Corcolle, and J. Kim, “Experimental Characterization of ALD Grown Al2O3 Film for Microelectronic Applications.” Advances in Materials Physics and Chemistry, 11, 7-19, 2021.01, doi: 10.4236/AMPC.2021.111002.上科大信息学院吴涛课题组

19. X. Ding, Z. Wu, M. Gao, M. Chen, J. Li, T. Wu, and L. Lou. 2022. "A High-Sensitivity Bowel Sound Electronic Monitor Based on Piezoelectric Micromachined Ultrasonic Transducers" Micromachines 13, no. 12: 2221.上科大信息学院吴涛课题组

20. S. Shao, Z. Luo, Y. Lu, A. Mazzalai, C. Tosi and T. Wu, "High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators," in Journal of Microelectromechanical Systems, vol. 31, no. 3, pp. 328-337, June 2022, doi: 10.1109/JMEMS.2022.3161055. 上科大信息学院吴涛课题组

21. Z. Luo, J. Cai, S. Zhang, Y. Gu, L. Lou and T. Wu, "Nonlinearity of Piezoelectric Micromachined Ultrasonic Transducer Using AlN Thin Film," in IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control, vol. 2, pp. 96-104, 2022, doi: 10.1109/OJUFFC.2022.3182926. 上科大信息学院吴涛课题组

22. J. Wu et al., "Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates," in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 69, no. 8, pp. 2579-2584, Aug. 2022, doi: 10.1109/TUFFC.2022.3179699. 上科大信息学院吴涛课题组

23. Ran Nie, Shuai Shao, Zhifang Luo, Xiaoxu Kang, and Tao Wu. "Characterization of Ferroelectric Al0.7Sc0.3N Thin Film on Pt and Mo Electrodes" Micromachines 2022, 13(10): 1629. doi:10.3390/mi13101629 上科大信息学院吴涛课题组

24. Huang J, Dai Z, Shen Z, et al. High-Speed Mid-Wave Infrared InAs/InAsSb Superlattice Uni-Traveling Carrier Photodetectors With Different Absorber Doping[J]. IEEE Transactions on Electron Devices, 2022, 69(12): 6890-6896. 上科大信息学院陈佰乐课题组

25. L. Xia, Y. Sun, C. Chang, T. Li, P. Zhou, and Y. Zou, "Group Index Engineered Photonic Crystal Waveguides and Microcavities in the 2 μm Waveband," in Frontiers in Optics + Laser Science 2022 (FIO, LS), Technical Digest Series (Optica Publishing Group, 2022), paper JTu5A.61. 上科大信息学院邹毅课题组

26. W. He, Y. Sun, L. Xia, P. Zhou, and Y. Zou, "Subwavelength structure engineered grating coupler for the 2-μm waveband," in Frontiers in Optics + Laser Science 2022 (FIO, LS), Technical Digest Series (Optica Publishing Group, 2022), paper JW5A.49. 上科大信息学院邹毅课题组

27. Y. Wang, K. Yadagiri, P. Wu, and T. Wu , "Temperature dependent magnetostatic and dynamic properties of soft magnetic FeGaB/Al2O3 thin films for microwave applications", AIP Advances 12, 035027 (2022) doi:10.1063/9.0000348. 上科大信息学院吴涛课题组

28. Y. Liu and T. Wu, "Comparison of Weighted And Traditional Electrode Configurations In S0 Resonators," 2022 IEEE International Ultrasonics Symposium (IUS), 2022, pp. 1-3, doi: 10.1109/IUS54386.2022.9957329. 上科大信息学院吴涛课题组

29. Y. Li, Y. Liu and T. Wu, "First-Order Shear Horizontal Mode Resonators Design of High k2t Based on LiNbO3 Thin Film," 2022 IEEE International Ultrasonics Symposium (IUS), 2022, pp. 1-4, doi: 10.1109/IUS54386.2022.9957283. 上科大信息学院吴涛课题组

30. S. Shao, Z. Luo and T. Wu, "Sub-6dB Aluminum Scandium Nitride Acoustic Delay Lines," 2022 IEEE International Ultrasonics Symposium (IUS), 2022, pp. 1-4, doi: 10.1109/IUS54386.2022.9958371. 上科大信息学院吴涛课题组

31. Y. Wang, J. Cai, T. Wu and F. Gao, "Photoacoustic Dual-mode Microsensor Based on PMUT Technology," 2022 IEEE International Symposium on Circuits and Systems (ISCAS), 2022, pp. 2836-2840, doi: 10.1109/ISCAS48785.2022.9937967. 上科大信息学院吴涛课题组

32. J. Wu, S. Zhang, H. Zhou, L. Zhang, P. Zheng, H. Yao, X. Zhao, K. Huang, T. Wu, X. Ou , "Monolithic Integration of Released and Solidly Mounted RF Acoustic Devices on Heterogeneous Substrate," 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022, pp. 1026-1029, doi: 10.1109/MEMS51670.2022.9699723. 上科大信息学院吴涛课题组

33. J. Cai, Y. Wang, L. Lou, S. Zhang, Y. Gu, F. Gao, T. Wu, "Photoacoustic and Ultrosound Dual-Modality Endoscopic Imaging Based on ALN PMUT Array," 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 2022, pp. 412-415, doi:10.1109/MEMS51670.2022.9699511. 上科大信息学院吴涛课题组

34. Yao L, Wang W, Yao J, et al. Interband transitions of InAs/AlAs Short-Period superlattices grown by molecular beam epitaxy[J]. Journal of Crystal Growth, 2023, 605: 127071.上科大信息学院陈佰乐课题组

35. Guo D, Huang J, Benamara M, et al. High operating temperature mid-infrared InGaAs/GaAs submonolayer quantum dot quantum cascade detectors on silicon[J]. IEEE Journal of Quantum Electronics, 2023, 59(2): 1-6. 上科大信息学院陈佰乐课题组

36. Hao X, Teng Y, Zhu H, et al. High-operating-temperature MWIR photodetector based on a InAs/GaSb superlattice grown by MOCVD[J]. Journal of Semiconductors, 2022, 43(1): 012303.上科大信息学院陈佰乐课题组



2021年：

  1. Cai J, Wang Y, Lou L, et al. Photoacoustic and Ultrasound Dual-modality Endoscopic Imaging Based on AlN PMUT Array[C]. IEEE MEMS 2021, 21161787. 上科大信息学院吴涛课题组
  2. Luo Z, Shao S, Wu T. AIN Contour Mode Resonators with Half Circle Shaped Reflectors[C]. IEEE NEMS 2021, 20866493. 上科大信息学院吴涛课题组
  3. Luo Z, Shao S, Wu T. Lamb Wave Resonators based on Co-sputtered Al0.78Sc0.22N Thin Film[C]. IEEE IUC 2021, 21434997. 上科大信息学院吴涛课题组
  4. Luo Z, Shao S, Wu T, et al. Al0.78Sc0.22N Lamb Wave Contour Mode Resonators[J]. IEEE Trans Ultrason Ferroelectr Freq Control, 2021 .上科大信息学院吴涛课题组
  5. Liu Y, Liu K, Wu T. Design and Analysis of High kt2 Shear Horizontal Wave Resonators[C]. IEEE IUS 2021, 21435091. 上科大信息学院吴涛课题组
  6. Cai J, Liu K, Lou L, et al. Increasing Ranging Accuracy of Aluminum Nitride PMUTS by Circuit Coupling[C]. IEEE MEMS 2021 , 20564825.上科大信息学院吴涛课题组
  7. Shen Z, Deng Z, Zhao X, et al. Submonolayer quantum dot quantum cascade long-wave infrared photodetector grown on Ge substrate[J]. Appl. Phys. Lett., 2021,118, 081102. 上科大信息学院陈佰乐课题组
  8. Shen Z, Deng Z, Zhao X, et al. Long-Wave Infrared Sub-Monolayer Quantum dot Quantum Cascade Photodetector[J]. J. Light. Technol., 2021, 39(5) 1489-1496.上科大信息学院陈佰乐课题组
  9. Wang W, Yao J, Wang J, et al. Characteristics of thin InAlAs digital alloy avalanche photodiodes[J]. Opt. Lett., 2021, 46(16) 3841-3844.上科大信息学院陈佰乐课题组
  10. Wang Y, Chen Y, Zhang Y, et al. Experimental Characterization of ALD Grown Al2O3 Film for Microelectronic Applications[J]. AMPC, 2021, 11(1) 7-19. 上科大量子器件中心Jangyong Kim
  11. Wang Y, Liu K, Shao S, Multiferroic Magnetic Sensor Based on AlN and Al0.7Sc0.3N thin film S[C], IEEE IUS 2021, 21434784. 上科大信息学院吴涛课题组/量子器件中心Jangyong Kim
  12. Shao S, Luo Z, Wu T, et al. High Figure-of-Merit Lamb Wave Resonators Based on Al0.7Sc0.3N Thin Film[J]. IEEE Electron Device Lett., 2021, 42(9) 1378-1381.上科大信息学院吴涛课题组
  13. Liu Y, Gao Z, Liu K, et al. Torsional MEMS Scanner Based on LiNbO3 Thin Film[C]. Transducers 2021. 20-25 June 2021.上科大信息学院吴涛课题组
  14. A. Gao, K. Liu, J. Liang and T. Wu, AlN MEMS filters with extremely high bandwidth widening capability, Microsystems & Nanoengineering, 6, 74, 2020.9, doi: 10.1038/s41378-020-00183-5 上科大信息学院吴涛课题组
  15. Z. Luo, S. Shao, T. Wu, “Characterization of ALN and AlScN film ICP etching for micro/nano fabrication”, Microelectronic Engineering, 111530, 2021.2, doi:10.1016/J.MEE.2021.111530. 上科大信息学院吴涛课题组
  16. Zhang Y, Xue F, Tang C, et al. Highly Efficient Electric-Field Control of Giant Rashba Spin–Orbit Coupling in Lattice-Matched InSb/CdTe Heterostructures[J]. ACS nano, 2020, 14(12)17396-17404.上科大信息学院寇煦丰课题组
  17. Xue F, Zhang Y, Zhang Y, et al. Narrow-Band Semiconductor Heterostructures for Efficient Spintronic Memory Device Applications[C]//2021 IEEE International Electron Devices Meeting (IEDM). IEEE, 2021: 32.5. 1-32.5. 4. 上科大信息学院寇煦丰课题组
  18. Liu X, Wu D, Liao L, et al. Temperature dependence of spin—orbit torque-driven magnetization switching in in situ grown Bi2Te3/MnTe heterostructures[J]. Applied Physics Letters, 2021, 118(11): 112406.上科大信息学院寇煦丰课题组
  19. Song Z, Zhou Z, Huang J, et al. Analysis of AM-to-PM conversion in MUTC photodiodes based on an equivalent circuit model[J]. Opt. Express, 2021, 29(21) 33582-33591.上科大信息学院陈佰乐课题组
  20. Xie Z, Zhou Z, Li L, et al. High-Speed 850 nm Photodetector for Zero-Bias Operation[J]. IEEE J Sel Top Quantum Electron, 2022, 28(2).上科大信息学院陈佰乐课题组
  21. Wang J, Xie Z, Zhu L, et al. InP-based Broadband Photodetectors with InGaAs/GaAsSb Type-II Superlattice[J]. IEEE Electron Device Lett., 2022, 43(5) 757-760.上科大信息学院陈佰乐课题组
  22. Huang J, Shen Z, Wang Z, et al. High-speed Mid-wave Infrared Uni-traveling Carrier Photodetector Based on InAs/InAsSb Type-II Superlattice[J]. IEEE Electron Device Lett., 2022, 43(5) 745-748. 上科大信息学院陈佰乐课题组
  23. Zhang A, Xia L, Li T, et al. Ultra-compact polarization-independent 3 dB power splitter in silicon[J]. Opt. Lett., 2021, 46(19) 5000-5003.上科大信息学院邹毅课题组
  24. Deng J, Zhang W, Dai X, et al. Nonmonotonic wavelength dependence of polarization-sensitive infrared photoresponse of an anisotropic semimetal[J]. Nanoscale, 2022.中科院技物所周靖课题组
  25. Yu Y, Zhou J, Chen X, et al. Narrowband tunable graphene perfect absorber based on dielectric microcavity in mid-infrared[C]. ICOSM 2021, 1203017. 中科院技物所周靖课题组

备注：以上未标注SQDL的论文，均已向中心说明该成果利用SQDL相关设备的情况。


二、专利类

已授权专利4项：

  1. 杨瑾屏, 李升, 宋艳汝, 杨士成, 王彩霞, 朱忠博, 刘志. 一种宽带硅基金属波导矩-圆模式变换器[P], 中国, ZL202110041854.4, 2021-12-03. 上科大大科学中心/刘志课题组
  2. 杨瑾屏, 宋艳汝, 刘志, 一种集总元件不等功分器及设计方法[P], 中国, ZL202110041855.9, 2022-3-04. 上科大大科学中心/刘志课题组
  3. 宋艳汝, 杨瑾屏, 刘志, 光刻板清洗装置[P], 中国, ZL202022159929.2, 2021-10-26. 上科大大科学中心/刘志课题组
  4. 宋艳汝, 杨瑾屏, 刘志, 一种制备超导探测器玻璃窗时所需的晶圆键合装置[P], 中国, ZL202022247713.1, 2021-3-30. 上科大大科学中心/刘志课题组

正在申请专利6项：

  1. 彭鹏飞, 宋艳汝, 方维政, 徐旭光, 一种单片晶圆显影装置[P], 中国, 202221005563.6, 2022-04-27. 上科大量子器件中心
  2. 宋艳汝, 杨瑾屏, 张硕, 夏经铠, 刘志, 一种超导转变边探测器及其制备方法[P], 中国, 202110560045.4, 2021-5-21. 上科大大科学中心/刘志课题组
  3. 杨瑾屏, 宋艳汝, 刘志, 一种具有最简结构的集总元件不等功分器及设计方法[P], 中国, 202110041855.9, 2021-1-13. 上科大大科学中心/刘志课题组
  4. 杨瑾屏, 李升, 宋艳汝, 李琪, 朱忠博, 刘志, 硅基太赫兹金属波导工艺可靠性测试装置及其测试方法[P], 中国, 202110041962.1, 2021-1-13. 上科大大科学中心/刘志课题组
  5. 宋艳汝, 杨瑾屏, 刘志, 一种适用于超导探测器玻璃窗的制备工艺[P], 中国, 202011076966.5, 2020-10-10. 上科大大科学中心/刘志课题组
  6. 宋艳汝, 杨瑾屏, 刘志, 制备超导探测器玻璃窗时所需的晶圆键合装置及使用方法[P], 中国, 202011077138.3, 2020-10-10. 上科大大科学中心/刘志课题组