溅射/热蒸发多晶片管道
溅射/热蒸发多晶片管道
联系人
杨楠, Weikai Shi
邮箱
yangnan@shanghaitech.edu.cn
电话
20685567
购买日期
2018/11/16
主要规格和技术参数
Magnetron Technical Specifications: Max RF Power:150W Max Current:1 Amp Non-Magnetic Target Thickness:1-5 mm Magnetic target Thickness:1–2.5 mm Maximum Temperature:200℃(Without water running) Maximum Heating Temperature:600℃ Ion gauge:5x10^-2-1x10^-8mtorr
主要功能及特色
PVD Products is a manufacturer of standard and custom thin film deposition systems and components including magnetron sputter sources. Our Titan line of magnetron sputter sources is based on a proven modular magnetic field design. The sources will provide long life, ease of use, and excellent film quality when used properly.
主要附件及配置
Ion gauge resistance gauge Vacuum chamber magnetron power source Heating source Dry pump Molecular pump