主要规格和技术参数
Magnetron Technical Specifications:
Max RF Power:150W
Max Current:1 Amp
Non-Magnetic Target Thickness:1-5 mm
Magnetic target Thickness:1–2.5 mm
Maximum Temperature:200℃(Without water running)
Maximum Heating Temperature:600℃
Ion gauge:5x10^-2-1x10^-8mtorr
主要功能及特色
PVD Products is a manufacturer of standard and custom thin film
deposition systems and components including magnetron sputter sources.
Our Titan line of magnetron sputter sources is based on a proven modular
magnetic field design. The sources will provide long life, ease of use,
and excellent film quality when used properly.
主要附件及配置
Ion gauge
resistance gauge
Vacuum chamber
magnetron
power source
Heating source
Dry pump
Molecular pump