| 编号 | 仪器名称 | Tool Name (nickname) | 厂牌 | 型号 | 状态 | 级别 | 负责人 | 采购年度 |
| 一、通风橱与湿法清洗设备(Wet Benches and Wet Cleaning Tools) | ||||||||
| 1-1 | 显影及去胶通风橱 | Developing and PR Strip Wet Bench (resist bench) | Wafab-Kinetics | 72" Manual Bench | 启用 | 2 | 熊荣欣 | 2017 |
| 1-2 | 1号旋转冲洗甩干机 | Spin Rinse Dryer-1 (SRD 1) | 中国电科第45研究所 | CXS-2150C | 启用 | 1 |
熊荣欣 |
2019 |
| 1-3 | 1号超声波清洗机 | #1 Ultrasonic Bath Cleaner (ultrasonicater 1) | Thermofisher | VS-10003 | 启用 | 0 |
熊荣欣 |
2017 |
| 1-4 | 4号加热板（热浴用） | #4 Manual Hot Plate (Hot plate 4) | Thermofisher | HP88857195 | 启用 | 0 | 熊荣欣 | 2017 |
| 1-5 | 1号电热鼓风干燥箱（烧杯用） | #1 Beaker-Only Blast Air Oven (oven 1) | 上海一恒 | DHG-9240A | 启用 | 0 |
熊荣欣 |
2017 |
| 1-6 | MOS级Piranha及HF腐蚀清洗通风橱-1 | MOS-grade Wet Etching and Clean Bench-1 (MOS clean bench 1) | Wafab-Kinetics | 72" Manual Bench | 启用 | 2 | 张艳 | 2017 |
| 1-7 | MOS级Piranha及HF腐蚀清洗通风橱-2 | MOS-grade Wet Etching and Clean Bench-2 (MOS clean bench 2) | 中国电科第45研究所 | SFQ-604SKFS | 启用 | 2 | 熊荣欣 | 2018 |
| 1-8 | 2号旋转冲洗甩干机 | Spin Rinse Dryer-2 (SRD 2) | 中国电科第45研究所 | CXS-2150C | 启用 | 1 |
张艳 |
2018 |
| 1-9 | Lift-off 通风橱(Si KOH刻蚀) | Lift-off Wet Bench (lift off bench) | Wafab-Kinetics | 72" Manual Bench | 启用 | 2 | 张超 | 2017 |
| 1-10 | 2号超声波清洗机 | #2 Ultrasonic Bath Cleaner (ultrasonicater 2) | As One | P60 | 启用 | 0 | 张超 | 2017 |
| 1-11 | 3号旋转冲洗甩干机 | Spin Rinse Dryer-3 (SRD 3) | 中国电科第45研究所 | CXS-2150C | 启用 | 1 | 张超 | 2019 |
| 1-12 | 3号电热鼓风干燥箱（烧杯用） | #3 Beaker-Only Blast Air Oven (oven 3) | 上海一恒 | DHG-9240A | 启用 | 0 | 张超 | 2017 |
| 1-13 | 1号通用通风橱 | General Wet Bench (general bench-1) | 展协 | - | 启用 | 2 | 陆盛楠 | 2017 |
| 1-14 | 3号超声波清洗机 | #3 Ultrasonic Bath Cleaner (ultrasonicater 3) | 新芝 | SB-5200DT | 启用 | 0 | 陆盛楠 | 2017 |
| 1-15 | 3号手动式匀胶旋涂仪 | #3 Manual Spin Coater (spinner 3) | Laurell | WS 650 | 启用 | 2 | 陆盛楠 | 2017 |
| 1-16 |
2号通用通风橱(mask KOH刻蚀) |
KOH Etch and General Wet Bench (KOH/general bench-2) | 展协 | - | 启用 | 2 | 何金金 | 2017 |
| 1-17 | 5号加热板（热浴用） | #5 Manual Hot Plate (Hot plate 5) | Thermofisher | HP88857195 | 启用 | 0 | 何金金 | 2017 |
| 1-18 | 4号旋转冲洗甩干机 | Spin Rinse Dryer-4 (SRD 4) | 奥曼特 | DSG05 | 启用 | 1 | 何金金 | 2017 |
| 1-19 | PDMS Station | PDMS (PDMS) | DOW CORNING |
|
启用 | 1 | 张艳 | 2018 |
| 1-20 | 4号电热鼓风干燥箱（PDMS及烧杯用） | #4 Beaker-and-PDMS-Only Blast Air Oven (oven 4) | 上海一恒 | DHG-9240A | 启用 | 0 | 张艳 | 2017 |
| 二、光刻设备（Lithography Tools） | ||||||||
| 2-1 | HMDS表面处理真空烘箱 | HMDS Prime Oven (prime oven) | YES | 310TA | 启用 | 2 | 熊荣欣 | 2017 |
| 2-2 | 双轨式自动甩胶显影机 | Auto Coat and Develop Track (track 1；track2) | C&D | P8000 | 启用 | 2 | 熊荣欣 | 2019 |
| 2-3 | 1号手动式匀胶旋涂仪 | #1 Manual Spin Coater (spinner 1) | Laurell | WS 650 | 启用 | 2 | 张艳 | 2017 |
| 2-4 | 2号手动式匀胶旋涂仪 | #2 Manual Spin Coater (spinner 2) | Laurell | WS 650 | 启用 | 2 | 张艳 | 2017 |
| 2-5 | 1号加热板（烤胶） | #1 Manual Hot Plate (hot plate 1) | Mycro | HP 1000-1 | 启用 | 0 | 张艳 | 2017 |
| 2-6 | 2号加热板（烤胶） | #2 Manual Hot Plate (hot plate 2) | As one | NDK-1K | 启用 | 0 | 张艳 | 2017 |
| 2-7 | 3号加热板（烤胶） | #3 Manual Hot Plate (hot plate 3) | Thermofisher | HP88857195 | 启用 | 0 | 张艳 | 2017 |
| 2-8 | 手动紫外光刻机 | Manual Mask Aligner (MJB4 aligner) | SUSS | MJB4 | 启用 | 2 | 熊荣欣 | 2016 |
| 2-9 | 无掩膜激光直写光刻机 | Laser Direct-Write Lithography System (ML3 Aligner) | Durham Magneto Optics/Quantum Design | Microwriter ML3 | 启用 | 2 | 张艳 | 2018 |
| 2-10 | 3D双光子微纳光刻系统 | 3D Microfabrication System (3D) | Nanoscribe | Photonic Professional GT2 | 启用 |
|
张艳 | 2023 |
| 2-11 | 扫描热探针光刻系统 | Thermal Scanning Probe Lithography (tSPL) | Heidelberg | NanoFrazor Sholar | 启用 |
|
张艳 | 2023 |
| 三、刻蚀设备(Etching Tools) | ||||||||
| 3-1 | 反应离子刻蚀系统 | Reactive Ion Etching System (RIE) | Plasmatherm/Advanced Vacuum | VISION 322 | 启用 | 2 | 张艳 | 2016 |
| 3-2 | 离子束刻蚀系统 | Ion Beam Milling System (ion mill) | Intlvac | Nanoquest I | 启用 | 2 | 熊荣欣 | 2017 |
| 3-3 | 紫外臭氧清洗机 | UV-Ozone Cleaner (UV-Ozone) | Samco | UV-2 | 启用 | 2 | 张艳 | 2018 |
| 3-4 | 二氟化氙刻蚀系统 | Xenon DiFluoride (XeF2) | Memsstar | ORBIS ALPHA | 启用 | 2 | 张艳 | 2020 |
| 3-5 |
低温感应耦合等离子刻蚀机 |
Deep Reactive Ion Etching (DRIE) |
SENTECH |
SI 500 C |
|
2 | 熊荣欣 | 安装中 |
| 四、薄膜设备 (Thin Film Tools) | ||||||||
| 4-1 | 等离子体增强化学气相沉积系统 | Plasma Enhanced Chemical Vapor Deposition System(PECVD) | Oxford | NGP80 PECVD | 启用 | 2 | 何金金 | 2016 |
| 4-2 | 原子层沉积系统 | Oxide ALD (ALD) | Veeco/CNT | Savannah S200 | 启用 | 2 | 陆盛楠 | 2019 |
| 4-3 | 1号磁控溅射薄膜沉积系统 | Sputter Deposition System (sputter 1) | K.J. Lesker | PVD 75 | 启用 | 2 | 张超 | 2018 |
| 4-4 | 2号磁控溅射薄膜沉积系统 | Sputter Deposition System （sputter 2 ) | 沈阳科仪 | TRP450 | 启用 | 2 | 何金金 | 2013 |
| 4-5 | 1号电子束沉积系统 | E-beam Deposition System (Ebeam1) | K.J. Lesker | PVD 75 | 启用 | 2 | 陆盛楠 | 2019 |
| 4-6 | 2号电子束沉积系统 | E-beam Deposition System (e-beam 2) | 沈阳科仪 | DZS500 | 启用 | 2 | 张超 | 2013 |
| 4-7 | 快速热处理系统 | Rapid Thermal Annealer(rta) | Allwin21 | AccuThermo AW610 | 启用 | 2 | 张超 | 2017 |
| 4-8 |
Parylene沉积系统 |
Parylene Deposition System（Parylene） | SCS | PDS2010 | 启用 | 2 | 何金金 | 2020 |
| 五、封装设备 （Packaging Tools） | ||||||||
| 5-1 | 晶圆切割机 | Wafer Dicing Saw (disco) | Disco | DAD323 | 启用 | 2 | 何金金 | 2017 |
| 5-2 | 临界点干燥仪 | Critical Point Dryer (cpd) | Tousimis | Autosamdri 815B-Series C | 启用 | 2 | 陆盛楠 | 2017 |
| 5-3 | 微控楔键合机 | Manual Wedge-Wedge Wirebonder (wire bonder) | West Bond | 7476E | 启用 | 2 | 张超 | 2017 |
| 六、其他加工设备 （Other Nanofabrication Tools） | ||||||||
| 6-1 | 聚合物笔直写系统 | Polymer Pen Lithography System (polymer pen) | TERA-Print | TERA Fab M | 启用 | 2 | 陆盛楠 | 2016 |
| 6-2 | 聚焦离子束-氦离子显微镜 | Helium Ion Microscope-Focused Ion Beam (him-fib) | Zeiss | ORION NanoFab | 启用 | 3 | 高珍 | 2018 |
| 七、量测设备 （Metrology Tools） | ||||||||
| 7-1 | 光学显微镜 | Manual Optical Microscope (om1) | Zeiss | Axio Lab.A1 | 启用 | 1 | 高珍 | 2017 |
| 7-2 | 光学显微镜 | Manual Optical Microscope (om2) | Zeiss | Axio Lab5 | 启用 | 1 | 高珍 | 2019 |
| 7-3 | 光学显微镜 | Manual Optical Microscope (om3) | Zeiss | Axio Lab5 | 启用 | 1 | 高珍 | 2019 |
| 7-4 | 6“光学显微镜 | 6" Manual Optical Microscope (om4) | Zeiss | Axio Vario | 启用 | 2 | 高珍 | 2019 |
| 7-5 | 3D共聚焦激光显微镜 | 3D Confocal Laser Scanning Microscope (clsm) | Zeiss | LSM800 | 启用 | 2 | 高珍 | 2018 |
| 7-6 | 光干涉式膜厚测量系统 | Film Thickness Measurement System (nanospec) | Toho Technology | TohoSpec3100 | 启用 | 2 | 高珍 | 2017 |
| 7-7 | 椭偏仪 | Spectroscopic Ellipsometer (ellipsometer) | Sentech | SENresearch4.0 | 启用 | 2 | 何金金 | 2019 |
| 7-8 | 台阶仪 | Stylus Surface Profiler (dektak) | Bruker | Dektak XT | 启用 | 2 | 陆盛楠 | 2015 |
| 7-9 | 接触角测量仪 | Contact Angle Measurement Instrument (tensiometer) | Kino | SL200KS | 启用 | 2 | 张超 | 2016 |
| 7-10 | 四探针电阻仪 | Automatic 4 point probe (4 point probe) | 4 Dimensions | 280SI | 启用 | 1 | 陆盛楠 | 2019 |
| 7-11 | 半导体器件分析仪 | Semiconductor Parameter Analyzer (B1500A) | Keysight | B1500A | 启用 | 1 | 张超 | 2017 |
| 7-12 | 6" 手动探针台 | 6" Manual Probe Station (probe station) | Signatone | S1160 | 启用 | 2 | 张超 | 2018 |
| 7-13 | 光能和光感探针台 |
|
MPI | YB-TMP-2 | 启用 | 2 | 何金金 | 2021 |
| 7-14 | 薄膜应力测试系统 | Stress Measurement System (stress meter) | Toho Technology | FLX2320S | 启用 | 2 | 何金金 | 2018 |
| 7-15 | 原子力显微镜 | Atomic Force Microscope (afm) | Oxford/Asylum Research | Cypher S | 启用 | 3 | 陆盛楠 | 2017 |
| 7-16 | 双通道电压源表 | Source Meter（2636B） | Keithly | 2636B |
启用 |
1 |
陆盛楠 |
2019 |
标操手册SOP