E beam magnification accuracy:30kv 0° X/Y≤4.63 μm +/- 3%, 30kv 90° X/Y≤4.63 μm +/- 3%
E beam high resolution measurement:2kv@25pA, T2 detector OptiTtit mode, <2.6nm
I beam Beam coincidence point:<5um
I beam Large Field of View (LFOV) Imaging:>=900um
I beam image High Resolution :30KV Xenon <20nm, 30KV Argon <25nm, 30KV Oxygen <25nm
I beam magnification acuuracy:<3%
integrated Fluorescence Light Microscope beam coincidence point :<5um
integrated Fluorescence Light Microscope Magnification Accuracy:95-105
integrated Fluorescence Light Microscope high resolution :365nm wavelength FWHM <500nm
integrated Fluorescence Light Microscope Obtaining a fluorescent image:Wavelength 450nm ,550nm,635nm
End pressure in room temperature :Chamber (at room temperature) : < 4 × 10-4 Pa, Lower IGP1: < 1 × 10-5 Pa, Upper IGP2: < 1 × 10-7 Pa, Ion Column IGP4: < 6 × 10-5 Pa